Entity, being, creature, individual, person are comparable when meaning something which has real and independent existence.
Entity, the most consistently abstract of these terms, implies such existence not only in the actual world but also in the realm of thought. An entity may be seen or heard or it may be invisible, intangible, or imaginary, but it may be thought of as really existing.
Being is for practical purposes definable in much the same terms as entity; however, it seldom retains the abstract meaning given to it by philosophers but easily slides into another and related sense, that of something or someone having material or immaterial existence, possessing qualities, properties, and attributes, and exciting thought or feelings.
Creature, in its most general sense, is the correlative of creator: it refers to any created thing, whether viewed as the creation of God or of natural influences. In this, its usual sense, creature is a general term including all living beings, but especially all animals and men. Often, as a modification of this sense, creature refers to a human being regarded as an object of pity, scorn, congratulation, or reprobation. In a narrower sense creature often refers to someone or something that is the creation of some power or influence and that, usually, is subject to it or obedient to its will.
Individual, in its fundamental sense, refers to whatever may be regarded as an entity or being, but the term stresses rather its incapacity for being divided and its existence as a unit.
Individual, therefore, in ordinary language applies to a single member of a conceivable group, especially of human beings, and is often used in contrast with such general or comprehensive terms as society, race, or family.
Concretely, individual is often used of a person who strikes one as rich in nature and as standing strongly alone or independently, but occasionally it is used contemptuously to describe one who makes himself unpleasantly conspicuous (as by undue familiarity, blatancy, or general obnoxiousness).
Person in its most common modern use denotes an individual human being without reference to sex, age, or identity.
Person is often found in other and richer senses, most of which involve the idea of the manifestation or the sustaining of a clearly defined character; sometimes it implies an entity distinguished from one’s body yet somehow associated with it and sometimes it implies this character as manifest to others.
Sometimes (as in law) person may refer not only to a man , but to a corporate body either of which has rights and duties that are recognized.
Again (as in Christian theology), person denotes one of the distinct modes of being in which the Supreme Being manifests Himself to men.
Sometimes, also, person may refer to the body of a human being or to his appearance, but even in these uses it usually suggests a body informed by a spirit or personality.